Electron emission from porous silicon planar emitters
نویسندگان
چکیده
Porous silicon planar emitters were fabricated by depositing a thin Au film on a conventional porous Si and their emission characteristics were examined. The emission currents and energy distributions were measured for the emitters with various Au thicknesses and for cesiated ones. The experimental results suggest that the emission mechanism of the porous silicon emitter studied in this work is conventional field emission, in which electrons are emitted from nanocrystals in the porous silicon directly into a vacuum. © 2003 American Vacuum Society. @DOI: 10.1116/1.1584470#
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تاریخ انتشار 2003